TY  - RPRT
TI  - Efficient creation of shallow NV$^-$ ensembles by high-angle ion implantation
AU  - Kento Sasaki
AU  - Hideyuki Watanabe
AU  - Tokuyuki Teraji
AU  - Takashi Taniguchi
AU  - Kenji Watanabe
AU  - Kensuke Kobayashi
PY  - 2026
DO  - 10.1103/d8vg-ntsg
UR  - https://arxiv.org/abs/2609.22937
ID  - 2609.22937
ER  -