@misc{indiciaef0ebe3653721,
  title = {Face-to-face anneal temperature controls lattice parameter in Ta(C,N) virtual substrates for AlGaN power electronics},
  author = {Noah Zahn and Julia L. Martin and Michelle A. Smeaton and Renae Gannon and Henry Garland and M. Brooks Tellekamp},
  year = {2026},
  url = {https://arxiv.org/abs/2609.24893},
  note = {Source identifier: 2609.24893}
}