TY  - RPRT
TI  - Face-to-face anneal temperature controls lattice parameter in Ta(C,N) virtual substrates for AlGaN power electronics
AU  - Noah Zahn
AU  - Julia L. Martin
AU  - Michelle A. Smeaton
AU  - Renae Gannon
AU  - Henry Garland
AU  - M. Brooks Tellekamp
PY  - 2026
UR  - https://arxiv.org/abs/2609.24893
ID  - 2609.24893
ER  -