@misc{indiciaed11a7b934e17, title = {Production of a Titanium Ion Beam Using Fluorides and Fluorine-Forming Precursors in an ECR Ion Source}, author = {D. K. Pugachev and K. I. Berestov and A. E. Bondarchenko and V. N. Loginov and A. N. Lebedev and E. Yu. Kidanova and K. I. Kuzmenkov and V. E. Mironov and D. S. Podoinikov and D. S. Yakovlev}, year = {2026}, url = {https://arxiv.org/abs/2609.29391}, note = {Source identifier: 2609.29391} }