@misc{indiciaec1b158907063,
  title = {VPEvolve: A Self-Evolving Virtual Process Engineer for Computational Lithography},
  author = {Tianyi Li and Wenxuan Dong and Donger Luo and Nan Wang and Yanpeng Chen and Jiaqi Liu and Xinyun Zhang and Hao Geng},
  year = {2026},
  url = {https://arxiv.org/abs/2609.32473},
  note = {Source identifier: 2609.32473}
}