TY  - RPRT
TI  - VPEvolve: A Self-Evolving Virtual Process Engineer for Computational Lithography
AU  - Tianyi Li
AU  - Wenxuan Dong
AU  - Donger Luo
AU  - Nan Wang
AU  - Yanpeng Chen
AU  - Jiaqi Liu
AU  - Xinyun Zhang
AU  - Hao Geng
PY  - 2026
UR  - https://arxiv.org/abs/2609.32473
ID  - 2609.32473
ER  -