@misc{indiciaeab92852954be,
  title = {Digital Etching of Single-Crystalline Silicon Fin Barriers Down to Sub-10 nm},
  author = {Yu Wu and Teun A. J. van Schijndel and Anthony P. McFadden and Wilson J. Yánez-Parreño and Raymond W. Simmonds and Christopher J. Palmstrøm},
  year = {2026},
  url = {https://arxiv.org/abs/2609.32826},
  note = {Source identifier: 2609.32826}
}