@misc{indiciaeacc105dcfa03,
  title = {Phase compositions of Si oxynitride: A comprehensive thermodynamic modeling study},
  author = {Andrey Sarikov and Mariia Babiichuk and Mariia Voitovych and Sergii V. Mamykin1},
  year = {2026},
  url = {https://arxiv.org/abs/2609.34796},
  note = {Source identifier: 2609.34796}
}