TY  - RPRT
TI  - Phase compositions of Si oxynitride: A comprehensive thermodynamic modeling study
AU  - Andrey Sarikov
AU  - Mariia Babiichuk
AU  - Mariia Voitovych
AU  - Sergii V. Mamykin1
PY  - 2026
UR  - https://arxiv.org/abs/2609.34796
ID  - 2609.34796
ER  -