@misc{indiciae149935ddc44c,
  title = {Hydrogen plasma-assisted atomic layer epitaxy of superconducting titanium nitride},
  author = {Yi-Hsun Chen and Yin-Chun Huang and Zachary Degnan and David Sommers and Kaijian Xing and Manjith Bose and Eduardo Solano and David Cortie and Michael Fuhrer and Julian A. Steele and Peter Jacobson and Miin-Jang Chen and Arkady Fedorov},
  year = {2026},
  url = {https://arxiv.org/abs/2610.00956},
  note = {Source identifier: 2610.00956}
}