@misc{indiciaeed9286083e88,
  title = {Feature identification for parameter extraction and defect detection using machine learning},
  author = {Yan Guo and Helda Pahlavani and Artem Khachaturiants and Khalid Elsayed and Jakob van de Laar and Erik Simons and Niranjan Saikumar and Hamed Sadeghian},
  year = {2026},
  doi = {10.1117/12.3011237},
  url = {https://arxiv.org/abs/2610.05812},
  note = {Source identifier: 2610.05812}
}