TY  - RPRT
TI  - Feature identification for parameter extraction and defect detection using machine learning
AU  - Yan Guo
AU  - Helda Pahlavani
AU  - Artem Khachaturiants
AU  - Khalid Elsayed
AU  - Jakob van de Laar
AU  - Erik Simons
AU  - Niranjan Saikumar
AU  - Hamed Sadeghian
PY  - 2026
DO  - 10.1117/12.3011237
UR  - https://arxiv.org/abs/2610.05812
ID  - 2610.05812
ER  -