TY  - RPRT
TI  - Three-dimensional dopant distribution from a single, out-of-focus spectroscopic image
AU  - Michael Deimetry
AU  - Timothy Petersen
AU  - Matthew Weyland
AU  - Scott Findlay
PY  - 2026
UR  - https://arxiv.org/abs/2610.11053
ID  - 2610.11053
ER  -