@misc{indiciae3b190413affb,
  title = {Autocorrelation-based beam shape optimization in scanning electron microscopy},
  author = {Rebecca Guan and Andreas Werbrouck and Matthew M. Maschmann and Matthias J Young},
  year = {2026},
  url = {https://arxiv.org/abs/2610.11414},
  note = {Source identifier: 2610.11414}
}