TY  - RPRT
TI  - Autocorrelation-based beam shape optimization in scanning electron microscopy
AU  - Rebecca Guan
AU  - Andreas Werbrouck
AU  - Matthew M. Maschmann
AU  - Matthias J Young
PY  - 2026
UR  - https://arxiv.org/abs/2610.11414
ID  - 2610.11414
ER  -