@misc{indiciaefa8d55b1a054,
  title = {Predicting Nanofabrication Variance: A Conditional Diffusion Model},
  author = {Wenhan Zhang and Ben Mills and Oleksandr Buchnev and Kevin F. MacDonald},
  year = {2026},
  url = {https://arxiv.org/abs/2610.13420},
  note = {Source identifier: 2610.13420}
}