TY  - RPRT
TI  - Predicting Nanofabrication Variance: A Conditional Diffusion Model
AU  - Wenhan Zhang
AU  - Ben Mills
AU  - Oleksandr Buchnev
AU  - Kevin F. MacDonald
PY  - 2026
UR  - https://arxiv.org/abs/2610.13420
ID  - 2610.13420
ER  -