@misc{indiciaeef177e8c4089,
  title = {From Surface Reactions to Inhibitor Coverage: A Machine-Learning-Assisted Computational Study of Area-Selective Atomic Layer Deposition},
  author = {Gijin Kim and Seungwu Han and Youngho Kang},
  year = {2026},
  url = {https://arxiv.org/abs/2610.22911},
  note = {Source identifier: 2610.22911}
}