TY  - RPRT
TI  - From Surface Reactions to Inhibitor Coverage: A Machine-Learning-Assisted Computational Study of Area-Selective Atomic Layer Deposition
AU  - Gijin Kim
AU  - Seungwu Han
AU  - Youngho Kang
PY  - 2026
UR  - https://arxiv.org/abs/2610.22911
ID  - 2610.22911
ER  -