@misc{indiciaec463c6d40430,
  title = {LithoWorld: An Endpoint World Model for Lithography Process-Window Recovery},
  author = {Botong Zhao and Fang Yu and Xinyuan Chen and Yue Lu},
  year = {2026},
  url = {https://arxiv.org/abs/2610.23408},
  note = {Source identifier: 2610.23408}
}