TY  - RPRT
TI  - Foundry-Fabricated Silicon Nitride Grating Arrays with Uniform Power Distribution at Visible Wavelengths
AU  - Amged Alquliah
AU  - Xiaoxin Wang
AU  - Jifeng Liu
AU  - Anthony Rizzo
PY  - 2026
UR  - https://arxiv.org/abs/2610.30387
ID  - 2610.30387
ER  -