@misc{indiciae4fd5c9d57665,
  title = {Study of Multilayer TiNx/Ti/TiNx Films Formed In Situ for High-Efficiency Integrated Microheaters},
  author = {Oleg A. Solovyev and Zakhar S. Enbaev and Alexander R. Shevchenko and Aleksander M. Mumlyakov and Pavel A. Berezhnoy and Mikael O. Geodakyan and Mikhail V. Tsvetkov and Michael A. Tarkhov and Igor V. Trofimov},
  year = {2026},
  url = {https://arxiv.org/abs/2610.37130},
  note = {Source identifier: 2610.37130}
}