TY  - RPRT
TI  - Study of Multilayer TiNx/Ti/TiNx Films Formed In Situ for High-Efficiency Integrated Microheaters
AU  - Oleg A. Solovyev
AU  - Zakhar S. Enbaev
AU  - Alexander R. Shevchenko
AU  - Aleksander M. Mumlyakov
AU  - Pavel A. Berezhnoy
AU  - Mikael O. Geodakyan
AU  - Mikhail V. Tsvetkov
AU  - Michael A. Tarkhov
AU  - Igor V. Trofimov
PY  - 2026
UR  - https://arxiv.org/abs/2610.37130
ID  - 2610.37130
ER  -