TY - RPRT TI - Atomistic Insights into MOCVD Growth of GaAs using a Closed Loop Autonomous System Combining Directed Reinforcement Learning and Kinetic Monte Carlo Simulations AU - Hrishi V. Harsora AU - Ashutosh Krishna Amaram AU - Raghavan Ranganathan AU - Tarun K. Agarwal PY - 2026 UR - https://arxiv.org/abs/2611.01646 ID - 2611.01646 ER -