TY  - RPRT
TI  - Surface chemistry as data for level-set simulation of etching and deposition
AU  - Lado Filipovic
AU  - Tobias Reiter
AU  - Philipp Haslhofer
PY  - 2026
UR  - https://arxiv.org/abs/2611.03707
ID  - 2611.03707
ER  -