@misc{indiciaedc833534dab8,
  title = {LithoSAGE: Spatially Adaptive and Geometrically Equivariant Neural Operators for Computational Lithography},
  author = {Ke Jin and Zhenli Xu and Zilin You},
  year = {2026},
  url = {https://arxiv.org/abs/2611.08001},
  note = {Source identifier: 2611.08001}
}