TY  - RPRT
TI  - LithoSAGE: Spatially Adaptive and Geometrically Equivariant Neural Operators for Computational Lithography
AU  - Ke Jin
AU  - Zhenli Xu
AU  - Zilin You
PY  - 2026
UR  - https://arxiv.org/abs/2611.08001
ID  - 2611.08001
ER  -