@misc{indiciae986c791e5548, title = {Lattice-Boltzmann Simulations of Fluid Flows in MEMS}, author = {Xiaobo Nie and Gary D. Doolen and Shiyi Chen}, year = {1998}, url = {https://arxiv.org/abs/comp-gas/9806001}, note = {Source identifier: comp-gas/9806001} }