@misc{indiciae125b15966c47,
  title = {Ultimate Depth Resolution and Profile Reconstruction in Sputter Profiling with AES and SIMS},
  author = {S. Hofmann},
  year = {2000},
  url = {https://arxiv.org/abs/cond-mat/0002451},
  note = {Source identifier: cond-mat/0002451}
}