@misc{indiciae2e7b3d1cdc81, title = {Substrate Sensitivity of the Adhesion and Material Properties of RF-Pecvd Amorphous Carbon}, author = {S. Paul and F. J Clough}, year = {2000}, url = {https://arxiv.org/abs/cond-mat/0007511}, note = {Source identifier: cond-mat/0007511} }