TY  - RPRT
TI  - Substrate Sensitivity of the Adhesion and Material Properties of RF-Pecvd Amorphous Carbon
AU  - S. Paul
AU  - F. J Clough
PY  - 2000
UR  - https://arxiv.org/abs/cond-mat/0007511
ID  - cond-mat/0007511
ER  -