TY  - RPRT
TI  - Structural properties of silicon dioxide thin films densified by medium-energy particles
AU  - Alexis Lefevre
AU  - Laurent J. Lewis
AU  - Ludvik Martinu
AU  - Michael R. Wertheimer
PY  - 2001
DO  - 10.1103/physrevb.64.115429
UR  - https://arxiv.org/abs/cond-mat/0103322
ID  - cond-mat/0103322
ER  -