@misc{indiciaea122da642b11, title = {Quantitative Comparison between AES and SIMS Depth Profiles of a Double Layer Structure of AlAs in GaAs Using the MRI-model}, author = {S. Hofmann and A. Rar and D. W. Moon and K. Yoshihara}, year = {2001}, url = {https://arxiv.org/abs/cond-mat/0104434}, note = {Source identifier: cond-mat/0104434} }