TY - RPRT TI - Quantitative Comparison between AES and SIMS Depth Profiles of a Double Layer Structure of AlAs in GaAs Using the MRI-model AU - S. Hofmann AU - A. Rar AU - D. W. Moon AU - K. Yoshihara PY - 2001 UR - https://arxiv.org/abs/cond-mat/0104434 ID - cond-mat/0104434 ER -