@misc{indiciae2c3875f26c8c, title = {Towards the fabrication of phosphorus qubits for a silicon quantum computer}, author = {J. L. O'Brien and S. R. Schofield and M. Y. Simmons and R. G. Clark and A. S. Dzurak and N. J. Curson and B. E. Kane and N. S. McAlpine and M. E. Hawley and G. W. Brown}, year = {2001}, doi = {10.1103/physrevb.64.161401}, url = {https://arxiv.org/abs/cond-mat/0104569}, note = {Source identifier: cond-mat/0104569} }