@misc{indiciae3a8e1e8aed4b,
  title = {Single Ion Implantation for Solid State Quantum Computer Development},
  author = {T. Schenkel and J. P. Holder and J. W. McDonald and J. Meijer and A. Persaud and D. H. Schneider},
  year = {2002},
  doi = {10.1117/12.460808},
  url = {https://arxiv.org/abs/cond-mat/0201549},
  note = {Source identifier: cond-mat/0201549}
}