@misc{indiciae94b59d6263cf, title = {Flexural Plate Wave Devices Fabricated from Silicon Carbide Membranes}, author = {Ndeye Fama Diagne and James Lindesay and Michael Spencer}, year = {2002}, url = {https://arxiv.org/abs/cond-mat/0205318}, note = {Source identifier: cond-mat/0205318} }