TY  - RPRT
TI  - Flexural Plate Wave Devices Fabricated from Silicon Carbide Membranes
AU  - Ndeye Fama Diagne
AU  - James Lindesay
AU  - Michael Spencer
PY  - 2002
UR  - https://arxiv.org/abs/cond-mat/0205318
ID  - cond-mat/0205318
ER  -