@misc{indiciae16a3d8179614,
  title = {Size and Location Control of Si Nanocrystals at Ion Beam Synthesis in Thin SiO2 Films},
  author = {Torsten Mueller and Karl-Heinz Heinig and Wolfhard Moeller},
  year = {2002},
  doi = {10.1063/1.1512952},
  url = {https://arxiv.org/abs/cond-mat/0208137},
  note = {Source identifier: cond-mat/0208137}
}