TY  - RPRT
TI  - Size and Location Control of Si Nanocrystals at Ion Beam Synthesis in Thin SiO2 Films
AU  - Torsten Mueller
AU  - Karl-Heinz Heinig
AU  - Wolfhard Moeller
PY  - 2002
DO  - 10.1063/1.1512952
UR  - https://arxiv.org/abs/cond-mat/0208137
ID  - cond-mat/0208137
ER  -