@misc{indiciae7bcadfdfb88c,
  title = {Encapsulation of phosphorus dopants in silicon for the fabrication of a quantum computer},
  author = {L. Oberbeck and N. J. Curson and M. Y. Simmons and R. Brenner and A. R. Hamilton and S. R. Schofield and R. G. Clark},
  year = {2002},
  doi = {10.1063/1.1516859},
  url = {https://arxiv.org/abs/cond-mat/0208355},
  note = {Source identifier: cond-mat/0208355}
}