@misc{indiciae3adcc0aefc82,
  title = {Self-aligned fabrication process for silicon quantum computer devices},
  author = {T. M. Buehler and R. P. McKinnon and N. E. Lumpkin and R. Brenner and D. J. Reilly and L. D. Macks and A. R. Hamilton and A. S. Dzurak and R. G. Clark},
  year = {2002},
  doi = {10.1088/0957-4484/13/5/330},
  url = {https://arxiv.org/abs/cond-mat/0208374},
  note = {Source identifier: cond-mat/0208374}
}