@misc{indiciaea15cb7583fe2,
  title = {A Low-Temperature Atomic Layer Deposition Liftoff Method for Microelectronic and Nanoelectronic Applications},
  author = {M. J. Biercuk and D. J. Monsma and C. M. Marcus and J. S. Becker and R. G. Gordon},
  year = {2003},
  doi = {10.1063/1.1612904},
  url = {https://arxiv.org/abs/cond-mat/0305711},
  note = {Source identifier: cond-mat/0305711}
}