@misc{indiciaefe31b55c6943,
  title = {Measurement of phosphorus segregation in silicon at the atomic-scale using STM},
  author = {Lars Oberbeck and Neil J. Curson and Toby Hallam and Michelle Y. Simmons and Robert G. Clark and Gerhard Bilger},
  year = {2003},
  doi = {10.1063/1.1784881},
  url = {https://arxiv.org/abs/cond-mat/0307495},
  note = {Source identifier: cond-mat/0307495}
}