TY  - RPRT
TI  - Measurement of phosphorus segregation in silicon at the atomic-scale using STM
AU  - Lars Oberbeck
AU  - Neil J. Curson
AU  - Toby Hallam
AU  - Michelle Y. Simmons
AU  - Robert G. Clark
AU  - Gerhard Bilger
PY  - 2003
DO  - 10.1063/1.1784881
UR  - https://arxiv.org/abs/cond-mat/0307495
ID  - cond-mat/0307495
ER  -