@misc{indiciae49143567593a,
  title = {Combined atomic force microscope and electron-beam lithography used for the fabrication of variable-coupling quantum dots},
  author = {M. C. Rogge and C. Fuehner and U. F. Keyser and R. J. Haug and M. Bichler and G. Abstreiter and W. Wegscheider},
  year = {2003},
  doi = {10.1063/1.1599972},
  url = {https://arxiv.org/abs/cond-mat/0307743},
  note = {Source identifier: cond-mat/0307743}
}