TY  - RPRT
TI  - Combined atomic force microscope and electron-beam lithography used for the fabrication of variable-coupling quantum dots
AU  - M. C. Rogge
AU  - C. Fuehner
AU  - U. F. Keyser
AU  - R. J. Haug
AU  - M. Bichler
AU  - G. Abstreiter
AU  - W. Wegscheider
PY  - 2003
DO  - 10.1063/1.1599972
UR  - https://arxiv.org/abs/cond-mat/0307743
ID  - cond-mat/0307743
ER  -