@misc{indiciae6a27426d436c,
  title = {Processing Issues in Top-Down Approaches to Quantum Computer Development in Silicon},
  author = {S. -J. Park and A. Persaud and J. A. Liddle and J. Nilsson and J. Bokor and D. H. Schneider and I. Rangelow and T. Schenkel},
  year = {2003},
  doi = {10.1016/j.mee.2004.03.037},
  url = {https://arxiv.org/abs/cond-mat/0310195},
  note = {Source identifier: cond-mat/0310195}
}