@misc{indiciae07e4bb491d87,
  title = {Ion beam sputtering method for progressive reduction of nanostructures dimensions},
  author = {M. Savolainen and V. Touboltsev and P. Koppinen and K. -P. Riikonen and K. Arutyunov},
  year = {2003},
  doi = {10.1007/s00339-004-2709-8},
  url = {https://arxiv.org/abs/cond-mat/0311383},
  note = {Source identifier: cond-mat/0311383}
}