@misc{indiciaeebaef856384c, title = {Multi-Dot Floating-Gates for Nonvolatile Semiconductor Memories - Their Ion Beam Synthesis and Morphology}, author = {T. Müller and C. Bonafos and K. -H. Heinig and M. Tencé and H. Coffin and N. Cherkashin and G. Ben Assayag and S. Schamm and G. Zanchi and C. Colliex and W. Möller and A. Claverie}, year = {2004}, doi = {10.1063/1.1794856}, url = {https://arxiv.org/abs/cond-mat/0407329}, note = {Source identifier: cond-mat/0407329} }